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MOSAIC PHP WITH MAXIMUM IMAGE CONVERSION EFFICIENCY
Englisch
114 b
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In the scientific monograph fundamental research of creation of MFPs of extra-high dimensionality allowed to optimize the prototype of mosaic technology with reduction of "blind spots" by achieving minimal edge damage areas at separation of wafers on crystals with provision of minimal gaps between crystals of adjacent submodules in the MFP up to the value not more than 2-3 µm for different defining semiconductor materials. The original fundamental approaches to the creation of MFPs and technological methods of fabrication of MFPs of ultrahigh dimensionality are presented. An optical methodology for achieving the ultimate efficiency of image conversion in MHPs has been developed. The proposed technological prototypes of MFPs of extra-high dimensionality optically overlap "blind zones" and provide an ultimate, practically 100%, image conversion efficiency. A methodology for analyzing the characteristics of IR FPs based on MSCNs and the image conversion efficiency of MFPs is developed. It is determined that the mosaic principle is fundamentally one of the promising, breakthrough technological approaches for achieving ultra-high dimensionality of MFPs with maximum image conversion efficiency.
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