Kontakt
Wie einkaufen
Versand
Kaufberater
Englisch
182 b
Bis zu 30 Tage Rückgaberecht
Kunden kauften auch
/
Broschur
53.39
€
/
Broschur
47.95
€
/
Broschur
20.79
€
This book presents a complete analysis and review of dynamics, control and fabrication of MEMS micromirrors for applications in DUV and EUV maskless lithography. The transient and resonant behavior of various types of electro-mechanically damped micromirrors with various degrees of freedom are discussed. The theoretical approach using the perturbation method and linear control theory is described. Micromirror design and fabrication issues including the material properties, process integration, and device reliability are addressed. Novel processing solutions such as the self-aligned spacer patterning technique to define nano-scale actuation gaps for low-voltage operation are introduced. Fabrication results of highly complicated 3-D MEMS devices such as vertical-comb tilting micromirrors and double-flexure piston micromirrors are demonstrated. This book serves as an excellent in-depth source of MEMS dynamics, control, and fabrication knowledge for both graduate students and experienced researchers.
Informationen zum Buch
Englisch
Verschenken Sie dieses Buch noch heute
Es ist ganz einfach
1 Legen Sie das Buch in Ihren Warenkorb und wählen Sie den Versand als Geschenk 2 Wir schicken Ihnen umgehend einen Gutschein 3 Das Buch wird an die Adresse des beschenkten Empfängers geliefertDas könnte Sie auch interessieren
/
Broschur
36.19
€
