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Micro process engineering is approaching both academia and industry. With the provision of micro devices and systems by commercial suppliers, one main barrier for using these units has been eliminated.This work focuses on processes rather than on devices: what is 'before' and 'behind' micro device fabrication - and gives a comprehensive and detailed overview on- A multi-faceted, hierarchic analysis of chemical micro process technology- Modelling and simulation of micro reactors- Liquid- and liquid/liquid-phase reactions- Gas/liquid reactions- Gas-phase reactions (heterogeneous catalysis)- Plants and applications like mixing, emulsion formation, heat exchange, organic and inorganic synthesis, multiphase and gas phase processes, periodic concentration and temperature cycling, catalyst screening, fine-chemical production, cosmetic, food, and others.